IN THIS SECTION
Commercial silica-on-silicon integrated optics
The University of Southampton offers commercial consultancy services into the fabrication of silica-on-silicon planar optics. The state-of-the-art equipment available for photonic microfabrication consists of the following tool set:
Class 100 yellow rooms, with processing capacity for
four, six and eight inch wafer designs (Achievable resolutions <0.5Ám).
FLAME HYDROLYSIS DEPOSITION (FHD)
Deposition of bespoke silica layers offering a wide range of refractive index contrasts and thicknesses.
Inductively Coupled Plasma (ICP) etches and e-beam deposited hard masks used to define waveguide structures.
Computer controlled precision dicing of processed
wafer into optical chips.
Copyright University of Southampton 2006