Commercial silica-on-silicon integrated optics

The University of Southampton offers commercial consultancy services into the fabrication of silica-on-silicon planar optics. The state-of-the-art equipment available for photonic microfabrication consists of the following tool set:


TOOL SET


PHOTOLITHOGRAPHY
Class 100 yellow rooms, with processing capacity for 
four, six and eight inch wafer designs (Achievable resolutions <0.5Ám).






FLAME HYDROLYSIS DEPOSITION (FHD) 
Deposition of bespoke silica layers offering a wide range of refractive index contrasts and thicknesses. 






DRY ETCHING 
Inductively Coupled Plasma (ICP) etches and e-beam deposited hard masks used to define waveguide structures. 






DICING 
Computer controlled precision dicing of processed 
wafer into optical chips.



 


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